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Comparative study of AIN dielectric films' electrical properties for MEMS capacitive switches
by
KOUTSOURELI, M
,
ADIKIMENAKIS, A
,
MICHALAS, L
,
PAPANDREOU, E
,
STAVRINIDIS, G
,
KONSTANTINIDIS, G
,
GEORGAKILAS, A
,
PAAIOANNOU
,
G
Published in
Microelectronic engineering
(2014)
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Journal Article
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applied sciences
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engineering
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physics
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applied sciences
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condensed matter: electronic structure, electrical, magnetic, and optical properties
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dielectric properties of solids and liquids
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dielectric thin films
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dielectrics, piezoelectrics, and ferroelectrics and their properties
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electronics
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English
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ScienceDirect Freedom Collection 2013
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