Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition
Vikharev, A. L., Bogdanov, S. A., Ovechkin, N. M., Ivanov, O. A., Radishev, D. B., Gorbachev, A. M., Lobaev, M. A., Vul, A. Ya, Dideikin, A. T., Kraev, S. A., Korolev, S. A.
Published in Semiconductors (Woodbury, N.Y.) (01.01.2021)
Published in Semiconductors (Woodbury, N.Y.) (01.01.2021)
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Journal Article
Diamond films grown by millimeter wave plasma-assisted CVD reactor
Vikharev, A.L., Gorbachev, A.M., Kozlov, A.V., Koldanov, V.A., Litvak, A.G., Ovechkin, N.M., Radishev, D.B., Bykov, Yu.V., Caplan, M.
Published in Diamond and related materials (01.04.2006)
Published in Diamond and related materials (01.04.2006)
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Journal Article
Diamond films grown by millimeter wave plasma-assisted CVD reactor
VIKHAREV, A. L, GORBACHEV, A. M, KOZLOV, A. V, KOLDANOV, V. A, LITVAK, A. G, OVECHKIN, N. M, RADISHEV, D. B, BYKOV, Yu. V, CAPLAN, M
Published in Diamond and related materials (2006)
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Published in Diamond and related materials (2006)
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