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Published in Japanese Journal of Applied Physics (01.11.2011)
Published in Japanese Journal of Applied Physics (01.11.2011)
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Journal Article
High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism
Hattori, Kei, Osato, Masaaki, Maeda, Takeshi, Okumura, Katsuya, Sekine, Makoto, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.11.2011)
Published in Japanese Journal of Applied Physics (01.11.2011)
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Journal Article
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Year of Publication 10.10.2012
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Year of Publication 07.06.2011
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Method and apparatus for treating gas containing flourine-containing compounds
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METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS
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Method and Apparatus for Treating Gas Containing Flourine-Containing Compounds
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Year of Publication 15.11.2007
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METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS
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METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS
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Year of Publication 20.12.2006
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TREATMENT METHOD OF GAS INCLUDING FLUORINE CONTAINING COMPOUND AND APPARATUS
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Year of Publication 29.09.2005
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METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS
NISHIKAWA, TADAKAZU, TANABE, YOSHIHIRO, MORI, YOICHI, OSATO, MASAAKI, NAGANO, SABUROU
Year of Publication 29.09.2005
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Year of Publication 29.09.2005
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