Normal incidence reflectance of ion beam deposited SiC films in the EUV
Keski-Kuha, R A, Osantowski, J F, Herzig, H, Gum, J S, Toft, A R
Published in Applied optics (2004) (15.07.1988)
Published in Applied optics (2004) (15.07.1988)
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Journal Article
Deterioration of vacuum ultraviolet reflecting surfaces by the formation of intermetallic compounds
Hunter, W R, Mikes, T L, Anstead, R J, Osantowski, J F
Published in Applied optics (2004) (01.09.1971)
Published in Applied optics (2004) (01.09.1971)
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Grazing incidence reflectance of SiC films produced byplasma-assisted chemical vapor deposition
Keski-Kuha, R A, Osantowski, J F, Toft, A R, Partlow, W D
Published in Applied optics (2004) (15.04.1988)
Published in Applied optics (2004) (15.04.1988)
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