Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
Smith, S., Tsiamis, A., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Walton, A.J., Dixson, R.G., Allen, R.A., Potzick, J.E., Cresswell, M.W., Orji, N.G.
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
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Journal Article
A Systematic Approach to Accurate Evaluation of CD-Metrology Tools
Orji, N.G., Bunday, B.D., Dixson, R.G., Allgair, J.A.
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
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Conference Proceeding
Comparison of measurement techniques for advanced photomask metrology
Smith, S., Tsiamis, A., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Walton, A., Dixson, R.G., Allen, R.A., Potzick, J.E., Cresswell, M.W., Orji, N.G.
Published in 2008 IEEE International Conference on Microelectronic Test Structures (01.03.2008)
Published in 2008 IEEE International Conference on Microelectronic Test Structures (01.03.2008)
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Conference Proceeding