Dynamic SIMS study on failure analysis of multiple E-test failure in wafer fabrication
Gui, D., Hua, Y.N., Eng, C.S., Ooi, S.C., Goh, A.
Published in Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005 (2005)
Published in Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005 (2005)
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