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Year of Publication 21.10.2021
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Year of Publication 21.10.2021
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Year of Publication 04.05.2023
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Substrate support, lithographic apparatus and loading method
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Year of Publication 17.01.2023
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Year of Publication 17.01.2023
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DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON WAFER-LEVEL ANALYSIS AND ROOT CAUSE ANALYSIS FOR SEMICONDUCTOR PROCESSING
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Year of Publication 22.02.2024
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Year of Publication 22.02.2024
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Contaminant analyzing inspection systems and methods, and lithographic apparatuses
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Year of Publication 11.10.2023
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Year of Publication 11.10.2023
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DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON WAFER-LEVEL ANALYSIS AND ROOT CAUSE ANALYSIS FOR SEMICONDUCTOR PROCESSING
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Year of Publication 30.06.2022
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Year of Publication 30.06.2022
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LITHOGRAPHIC PROJECTION ASSEMBLY HAVING LAYOUT CAPABLE OF TRANSFERRING SUBSTRATE, APPARATUS FOR HANDLING SUBSTRATE, SUBSTRATE HANDLER ASSEMBLY AND METHOD FOR HANDLING SUBSTRATE
HENNUS PIETER RENAAT MARIA, VANGROOS PIETER JOHANNES MARIUS, KLOMP ALBERT JAN HENDRIK, ONVLEE JOHANNES, HOOGKAMP JAN FREDERIK, VISSER RAIMOND
Year of Publication 18.09.2004
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Year of Publication 18.09.2004
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Pollutant analysis and measurement system, photoetching equipment and method thereof
ONVLEE, JOHANNES, PALOSKI MARK E, DOHAN CHRISTOPHER MICHAEL, BENDIKSEN AAGE
Year of Publication 02.12.2022
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Year of Publication 02.12.2022
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METHODS AND APPARATUS FOR DETERMINING THE POSITION OF A TARGET STRUCTURE ON A SUBSTRATE, METHODS AND APPARATUS FOR DETERMINING THE POSITION OF A SUBSTRATE
ONVLEE, Johannes, BOSHOUWERS, Augustinus, Hubert, Maria, BIJNEN, Franciscus, Godefridus, Casper
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS AND LOADING METHOD
SYMENS, Wim, ONVLEE, Johannes, DE GROOT, Antonius Franciscus Johannes, VLES, David Ferdinand
Year of Publication 18.04.2019
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Year of Publication 18.04.2019
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