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Year of Publication 10.07.2023
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피쳐에 산화물 층을 형성하기 위한 이중 압력 산화 방법
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Year of Publication 09.08.2024
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Year of Publication 24.06.2024
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REMOTE PLASMA OXIDATION CHAMBER
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Year of Publication 07.04.2023
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Year of Publication 07.04.2023
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ARGON ADDITION TO REMOTE PLASMA OXIDATION
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Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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ARGON ADDITION TO REMOTE PLASMA OXIDATION
OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, KIM TAEWAN, HANSEN ERIKA, SWENBERG JOHANES S, HAWRYLCHAK LARA, LO HANSEL
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER
OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, RAJU HEMANTHA, TJANDRA AGUS SOFIAN, LO HANSEL, SHAH KARTIK
Year of Publication 17.10.2022
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Year of Publication 17.10.2022
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반응물 가스를 전달하는 처리 시스템 및 방법
OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, HANSEN ERIKA, GEORGE RENE, HAWRYLCHAK LARA, SHONO ERIC, LO HANSEL, KAUFMAN OSBORN TOBIN, SHAH KARTIK
Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH
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Year of Publication 30.04.2021
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Year of Publication 30.04.2021
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GAS INJECTOR WITH BAFFLE
OLSEN CHRISTOPHER S, PANDEY VISHWAS KUMAR, SHONO ERIC KIHARA, PRADHAN KAILASH, TALLAVARJULA SAIRAJU, MOFFATT STEPHEN, HAWRYLCHAK LARA, GEORGE RENE, SHAH KARTIK, SWENBERG JOHANES F
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
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원격 플라즈마 산화 챔버
OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, PRASAD CHAITANYA A, TJANDRA AGUS SOFIAN, HAWRYLCHAK LARA
Year of Publication 09.01.2020
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Year of Publication 09.01.2020
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더 양호한 웨이퍼 균일성을 위한 비대칭 주입
OLSEN CHRISTOPHER S, SHONO ERIC KIHARA, PANDEY VISHWAS KUMAR, HANSEN ERIKA, GEORGE RENE, HAWRYLCHAK LARA, SHAH KARTIK BHUPENDRA, LO HANSEL, KAUFMAN OSBORN TOBIN
Year of Publication 10.09.2021
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Year of Publication 10.09.2021
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