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Atomic layer deposition of chalcogenide thin films: processes, film properties, applications, and bibliometric prospect
by
Oke, James A.
,
Olotu
,
Olufunsho O
.
,
Jen, Tien-Chien
Published in
Journal of materials research and technology
(01.09.2022)
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Journal Article
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engineering
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atomic layer deposition
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bibliometric
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chalcogenide
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materials science
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materials science, multidisciplinary
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metallurgy & metallurgical engineering
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English
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