Minority Carrier Lifetime in Czochralski Silicon Containing Oxide Precipitates
Murphy, John D., Bothe, Karsten, Olmo, Massimiliano, Voronkov, Vladimir V., Falster, Robert J.
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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PROCESS FOR ACHIEVING CONTROLLED PRECIPITATION PROFILES IN SILICON WAFERS
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Year of Publication 15.03.2000
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Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process thereof
FALSTER, ROBERT, GAMBARO, DANIELA, CORNARA, MARCO, OLMO, MASSIMILIANO
Year of Publication 25.02.2009
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Year of Publication 25.02.2009
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Ideal oxygen precipitating silicon wafers
FALSTER, ROBERT, GAMBARO, DANIELA, CORNARA, MARCO, OLMO, MASSIMILIANO
Year of Publication 10.09.2008
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Year of Publication 10.09.2008
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Ideal oxygen precipating silicon wafers and oxygen out-diffusion-less process therefor
FALSTER, ROBERT, GAMBARO, DANIELA, CORNARA, MARCO, OLMO, MASSIMILIANO
Year of Publication 16.03.2005
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Year of Publication 16.03.2005
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Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor
Falster, Robert J, Cornara, Marco, Gambaro, Daniela, Olmo, Massimiliano
Year of Publication 01.02.2005
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Year of Publication 01.02.2005
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SAUERSTOFFAUSDIFFUSIONSLOSES SAUERSTOFF-AUSFÄLLUNGSVERFAHREN IN SILIZIUMWAFER
FALSTER, ROBERT, GAMBARO, DANIELA, CORNARA, MARCO, OLMO, MASSIMILIANO
Year of Publication 24.06.2004
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Year of Publication 24.06.2004
Patent
Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor
Cornara, Marco, Falster, Robert, Gambaro, Daniela, Olmo, Massimiliano
Year of Publication 23.10.2003
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Year of Publication 23.10.2003
Patent