Search Results - "Okajo Taketoshi" :: K.UTB vyhledávací portál

CHAMBER CLEANING METHOD

by MIMURA TAKANORI, IWATA MANABU, HONDA MASANOBU, OKAJO TAKETOSHI, HIRANO TAICHI, HANAOKA HIDETOSHI
Year of Publication 09.03.2011

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Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatus

by Okajo Taketoshi, Makabe Toshiyuki
Year of Publication 09.08.2016

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Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein

by Okajo, Taketoshi
Year of Publication 22.09.2009

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Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein

by OKAJO TAKETOSHI
Year of Publication 22.09.2009

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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF CHANGING SUBSTRATE TEMPERATURE SETTING REGION

by MAKABE TOSHIYUKI, OKAJO TAKETOSHI
Year of Publication 05.09.2013

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Substrate processing apparatus, pressure control method for substrate processing apparatus

by OKAJO TAKETOSHI
Year of Publication 03.05.2006

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Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein

by OKAJO TAKETOSHI
Year of Publication 27.04.2006

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SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING SAME

by MAKABE TOSHIYUKI, OKAJO TAKETOSHI
Year of Publication 20.05.2010

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Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium

by Sasaki, Yasuharu, Okajo, Taketoshi
Year of Publication 01.09.2009

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Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium

by SASAKI YASUHARU, OKAJO TAKETOSHI
Year of Publication 01.09.2009

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METHOD FOR DIAGNOSING ELECTROSTATIC CHUCK, VOCUUM PROCESSING APPARATUS AND STORAGE MEDIUM

by SASAKI YASUHARU, OKAJO TAKETOSHI
Year of Publication 02.05.2008

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METHOD FOR DIAGNOSING ELECTROSTATIC CHUCK, VACUUM PROCESSING APPARATUS, AND STORAGE MEDIUM

by SASAKI YASUHARU, OKAJO TAKETOSHI
Year of Publication 01.05.2008

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TWI419253B

by OKAJO, TAKETOSHI, SASAKI, YASUHARU
Year of Publication 11.12.2013

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Apparatus and method for evaluating a substrate mounting device

by SASAKI YASUHARU, OKAJO TAKETOSHI, UEDA TAKEHIRO, OOHASHI KAORU
Year of Publication 05.11.2013

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Chamber cleaning method

by MIMURA TAKANORI, IWATA MANABU, HONDA MASANOBU, OKAJO TAKETOSHI, HIRANO TAICHI, HANAOKA HIDETOSHI
Year of Publication 07.04.2015

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Substrate processing apparatus, pressure control method for substrate processing apparatus

by OKAJO TAKETOSHI
Year of Publication 12.12.2007

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APPARATUS AND METHOD FOR TESTING A TEMPERATURE MONITORING SUBSTRATE

by SASAKI YASUHARU, OKAJO TAKETOSHI, UEDA TAKEHIRO
Year of Publication 04.09.2008

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Method for diagnosing electrostatic chuck and vacuum processing apparatus

by SASAKI YASUHARU, OKAJO TAKETOSHI
Year of Publication 16.12.2009

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Method of diagnosing electrostatic chuck, vacuum treatment device and storage medium

by OKAJO, TAKETOSHI, SASAKI, YASUHARU
Year of Publication 01.09.2008

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Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium

by SASAKI YASUHARU, OKAJO TAKETOSHI
Year of Publication 30.04.2008

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