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"Oka, Shinsuke"
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COMPUTER PROGRAM, INFORMATION PROCESSING DEVICE, AND INFORMATION PROCESSING METHOD
by
OKA
,
Shinsuke
Year of Publication
24.10.2024
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SUBSTRATE PROCESSING DEVICE AND ELECTROSTATIC CHUCK
by
OKA
,
Shinsuke
Year of Publication
25.07.2024
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기판 홀딩 방법 및 기판 처리 장치
by
OKA SHINSUKE
Year of Publication
27.06.2024
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PLASMA PROCESSING APPARATUS, MONITORING METHOD AND MONITORING PROGRAM
by
OKA SHINSUKE
Year of Publication
13.07.2023
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PLASMA PROCESSING APPARATUS TEMPERATURE CONTROL METHOD AND TEMPERATURE CONTROL PROGRAM
by
OKA SHINSUKE
Year of Publication
29.06.2023
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SUBSTRATE HOLDING METHOD AND SUBSTRATE PROCESSING APPARATUS
by
OKA
,
Shinsuke
Year of Publication
25.05.2023
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SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING DEVICE, AND ELECTROSTATIC ATTRACTION METHOD
by
OKA SHINSUKE
Year of Publication
07.04.2023
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SUBSTRATE SUPPORTER SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC ATTRACTION METHOD
by
OKA SHINSUKE
Year of Publication
04.04.2023
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PLASMA PROCESSING APPARATUS
by
OKA SHINSUKE
Year of Publication
24.06.2022
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PLASMA PROCESSING APPARATUS
by
OKA SHINSUKE
Year of Publication
21.06.2022
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PLASMA PROCESSING APPARATUS, THERMAL RESISTANCE ACQUISITION METHOD, AND THERMAL RESISTANCE ACQUISITION PROGRAM
by
OKA SHINSUKE
Year of Publication
25.03.2022
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MOUNTING PLATFORM AND PLASMA PROCESSING EQUIPMENT
by
OKA SHINSUKE
Year of Publication
14.03.2022
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STAGE AND PLASMA PROCESSING APPARATUS
by
OKA SHINSUKE
Year of Publication
10.03.2022
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PLASMA PROCESSING APPARATUS TEMPERATURE CONTROL METHOD AND TEMPERATURE CONTROL PROGRAM
by
OKA SHINSUKE
Year of Publication
23.11.2020
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PLASMA PROCESSING APPARATUS AND CALCULATION METHOD
by
OKA SHINSUKE
Year of Publication
23.11.2020
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PLASMA PROCESSING DEVICE, TEMPERATURE CONTROL METHOD AND TEMPERATURE CONTROL PROGRAM
by
OKA SHINSUKE
Year of Publication
19.11.2020
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PLASMA PROCESSING DEVICE, CALCULATION METHOD AND CALCULATION PROGRAM
by
OKA SHINSUKE
Year of Publication
19.11.2020
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PLASMA PROCESSING DEVICE, CALCULATION METHOD AND CALCULATION PROGRAM
by
OKA SHINSUKE
Year of Publication
18.06.2020
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PLASMA PROCESSING APPARATUS CALCULATION METHOD AND CALCULATION PROGRAM
by
OKA SHINSUKE
Year of Publication
09.06.2020
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PLASMA PROCESSING APPARATUS MONITORING METHOD AND MONITORING PROGRAM
by
OKA SHINSUKE
Year of Publication
16.04.2020
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