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"Ohto, Michiaki"
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원통형 스퍼터링 타깃용 열간 압출 소재, 및 원통형 스퍼터링 타깃의 제조 방법
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
21.09.2018
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HOT EXTRUDED MATERIAL FOR CYLINDRICAL SPUTTERING TARGET AND METHOD FOR MANUFACTURING CYLINDRICAL SPUTTERING TARGET
by
SAKURAI Akira
,
OHTO Michiaki
,
KUMAGAI Satoshi
Year of Publication
12.04.2018
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구리 합금제 백킹 튜브 및 구리 합금제 백킹 튜브의 제조 방법
by
MISHIMA AKIFUMI
,
KATO SHINJI
,
OHTO MICHIAKI
,
YOSUKE MASANORI
Year of Publication
17.12.2018
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MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
01.12.2016
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METHOD FOR PRODUCING CA-CONTAINING COPPER ALLOY
by
SONOHATA TAKASHI
,
KUMAGAI SATOSHI
,
OHTO MICHIAKI
Year of Publication
22.08.2016
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MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
02.12.2015
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COPPER ALLOY BACKING TUBE AND PRODUCTION METHOD FOR COPPER ALLOY BACKING TUBE
by
KATO Shinji
,
OHTO Michiaki
,
YOSUKE Masanori
,
MISHIMA Akifumi
Year of Publication
19.10.2017
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MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
29.10.2015
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METHOD FOR PRODUCING CA-CONTAINING COPPER ALLOY
by
SONOHATA TAKASHI
,
KUMAGAI SATOSHI
,
OHTO MICHIAKI
Year of Publication
25.06.2015
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METHOD FOR MANUFACTURING MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
SONOHATA TAKASHI
,
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
22.11.2016
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METHOD FOR MANUFACTURING MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
SONOHATA TAKASHI
,
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
25.01.2016
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METHOD FOR MANUFACTURING MATERIAL FOR CYLINDRICAL SPUTTERING TARGET
by
SONOHATA TAKASHI
,
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
15.10.2015
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HOT EXTRUDED MATERIAL FOR CYLINDRICAL SPUTTERING TARGET AND METHOD OF MANUFACTURING CYLINDRICAL SPUTTERING TARGET
by
Kumagai, Satoshi
,
Sakurai, Akira
,
Ohto
,
Michiaki
Year of Publication
21.02.2019
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Cylindrical sputtering target material
by
Sakurai Akira
,
Ohto Michiaki
,
Kumagai Satoshi
Year of Publication
29.08.2017
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COPPER ALLOY BACKING TUBE AND METHOD OF MANUFACTURING COPPER ALLOY BACKING TUBE
by
Kato, Shinji
,
Mishima, Akifumi
,
Ohto
,
Michiaki
,
Yosuke, Masanori
Year of Publication
25.04.2019
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METHOD FOR MANUFACTURING Ca-CONTAINING COPPER ALLOY
by
KUMAGAI Satoshi
,
OHTO Michiaki
,
SONOHATA Takashi
Year of Publication
27.10.2016
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CYLINDRICAL SPUTTERING TARGET MATERIAL
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
14.07.2016
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Manufacturing method of cylindrical sputtering target material
by
Kumagai, Satoshi
,
Sakurai, Akira
,
Sonohata, Takashi
,
Ohto
,
Michiaki
Year of Publication
29.05.2018
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Zylindrisches Sputter-Target-Material
by
Kumagai, Satoshi
,
Sakurai, Akira
,
Ohto
,
Michiaki
Year of Publication
06.05.2021
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Material for cylindrical sputtering target
by
KUMAGAI SATOSHI
,
OHTO MICHIAKI
,
SAKURAI AKIRA
Year of Publication
30.12.2015
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alloys
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