Carbon nanotube via interconnect technologies: size-classified catalyst nanoparticles and low-resistance ohmic contact formation
Awano, Y., Sato, S., Kondo, D., Ohfuti, M., Kawabata, A., Nihei, M., Yokoyama, N.
Published in Physica status solidi. A, Applications and materials science (01.11.2006)
Published in Physica status solidi. A, Applications and materials science (01.11.2006)
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Journal Article
Synthesis of SiGeC layers by ion implantation of Ge and C
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Conference Proceeding
Journal Article
Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles
Sato, S., Nihei, M., Mimura, A., Kawabata, A., Kondo, D., Shioya, H., Iwai, T., Mishima, M., Ohfuti, M., Awano, Y.
Published in 2006 International Interconnect Technology Conference (2006)
Published in 2006 International Interconnect Technology Conference (2006)
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Conference Proceeding
Low-resistance multi-walled carbon nanotube vias with parallel channel conduction of inner shells [IC interconnect applications]
Nihei, M., Kondo, D., Kawabata, A., Sato, S., Shioya, H., Sakaue, M., Iwai, T., Ohfuti, M., Awano, Y.
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
Published in Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005 (2005)
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Conference Proceeding
Carbon nanotube via interconnect technologies : size-classified catalyst nanoparticles and low-resistance ohmic contact formation: Frontiers in semiconductor nanoscience (Part A): In honour of Gerhard Abstreiter
AWANO, Y, SATO, S, KONDO, D, OHFUTI, M, KAWABATA, A, NIHEI, M, YOKOYAMA, N
Published in Physica status solidi. A, Applications and materials science (2006)
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Published in Physica status solidi. A, Applications and materials science (2006)
Journal Article
Electrical Properties of Carbon Nanotube Via Interconnects Fabricated by Novel Damascene Process
Nihei, M., Hyakushima, T., Sato, S., Nozue, T., Norimatsu, M., Mishima, M., Murakami, T., Kondo, D., Kawabata, A., Ohfuti, M., Awano, Y.
Published in 2007 IEEE International Interconnect Technology Conferencee (01.06.2007)
Published in 2007 IEEE International Interconnect Technology Conferencee (01.06.2007)
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Conference Proceeding
Carbon nanotube via interconnects with large current carrying capacity
Nihei, M., Kawabata, A., Sato, S., Nozue, T., Hyakushima, T., Norimatsu, M., Murakami, T., Kondo, D., Ohfuti, M., Awano, Y.
Published in 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (01.10.2008)
Published in 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (01.10.2008)
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Conference Proceeding