Electrical Properties and Thermodynamic Stability of Sr(Ti 1-x ,Ru x )O 3 Thin Films Deposited by Inductive-Coupling-Plasma-Induced RF Magnetron Sputtering
Ryoichi Ohara, Ryoichi Ohara, Tatsuo Schimizu, Tatsuo Schimizu, Kenya Sano, Kenya Sano, Masahiko Yoshiki, Masahiko Yoshiki, Takashi Kawakubo, Takashi Kawakubo
Published in Japanese Journal of Applied Physics (01.03.2001)
Published in Japanese Journal of Applied Physics (01.03.2001)
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Journal Article
ELECTRICAL PROPERTIES AND THERMODYNAMIC STABILITY OF Sr(Ti1-x,Rux)O3 THIN FILMS DEPOSITED BY INDUCTIVE-COUPLING-PLASMA-INDUCED RF MAGNETRON SPUTTERING
Ohara, R, Schimizu, T, Sano, K, Yoshiki, M, Kawakubo, T
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 3A, pp. 1384-1387. 2001 (2001)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 3A, pp. 1384-1387. 2001 (2001)
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Journal Article
PIEZOELECTRIC THIN FILM RESONATOR AND FREQUENCY VARIABLE RESONATOR USING THE RESONATOR
YASUMOTO TAKAAKI, KAWAKUBO TAKASHI, SHIMIZU TATSUO, YANASE NAOKO, OHARA RYOICHI, ABE KAZUHIDE
Year of Publication 29.03.2003
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Year of Publication 29.03.2003
Patent
HIGH FREQUENCY FILTER
KAWAKUBO TAKASHI, TSURUMI HIROSHI, YOSHIDA HIROSHI, OHARA RYOICHI, ABE KAZUHIDE, FUJIMOTO RYUICHI
Year of Publication 29.03.2003
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Year of Publication 29.03.2003
Patent