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PREPARATION OF CHEMICALLY AMPLIFIED PHOTORESISTS WITH N-HYDROXYPHTHALIMIDE STYRENESULFONATE GROUPS AND THEIR PROPERTIES
by
Chae, Kyu Ho
,
Oh
,
Yark Jun
Published in
Journal of Photopolymer Science and Technology
(1994)
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Journal Article
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chemistry
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materials chemistry
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organic chemistry
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polymers and plastics
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English
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