Analysis of Post-Chemical-Mechanical-Polishing Cleaning Mechanisms for Improving Time-Dependent Dielectric Breakdown Reliability
Yamada, Yohei, Yagi, Yasuhito, Konishi, Nobuhiro, Ogiso, Naohito, Katsuyama, Kiyomi, Asaka, Shoji, Noguchi, Junji, Miyazaki, Tadakazu
Published in Journal of the Electrochemical Society (2008)
Published in Journal of the Electrochemical Society (2008)
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