A <100 PPB/K Frequency-Matching Temperature Stability MEMS Rate Integrating Gyroscope Enabled by Donut-Mass Structure
Kaji, Shiori, Gando, Ryunosuke, Masunishi, Kei, Ogawa, Etsuji, Miyazaki, Fumito, Hiraga, Hiroki, Tomizawa, Yasushi, Shibata, Hideki
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
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Conference Proceeding
A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement
Gando, Ryunosuke, Maeda, Shunta, Masunishi, Kei, Tomizawa, Yasushi, Ogawa, Etsuji, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, Tamio
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Initial Investigation of Physically Tightly-Coupled Single-Chip MEMS IMU for Mutual Compensation of Two Differential Resonant Accelerometers and a Mode-Matched Donut-Mass Gyroscope
Miyazaki, Fumito, Ono, Daiki, Ogawa, Jumpei, Tomioka, Tazuko, Masunishi, Kei, Uchida, Kengo, Murase, Hideaki, Ogawa, Etsuji, Ishibashi, Fumitaka, Tomizawa, Yasushi
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
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Conference Proceeding
Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes
Masunishi, Kei, Ogawa, Etsuji, Ono, Daiki, Miyazaki, Fumito, Uchida, Kengo, Ogawa, Jumpei, Murase, Hideaki, Ishibashi, Fumitaka, Tomizawa, Yasushi
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
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Conference Proceeding
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE, UCHIDA KENGO
Year of Publication 26.05.2023
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Year of Publication 26.05.2023
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, UCHIDA KENGO, MURASE HIDEAKI
Year of Publication 27.03.2024
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Year of Publication 27.03.2024
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, UCHIDA KENGO, MURASE HIDEAKI
Year of Publication 27.03.2024
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Year of Publication 27.03.2024
Patent
CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure
Yamazaki, Hiroaki, Kurui, Yoshihiko, Saito, Tomohiro, Ogawa, Etsuji, Obara, Kei, Gando, Ryunosuke, Ono, Daiki, Ikehashi, Tamio
Published in Japanese Journal of Applied Physics (01.10.2018)
Published in Japanese Journal of Applied Physics (01.10.2018)
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Journal Article
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, MIYAZAKI FUMITO, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE, UCHIDA KENGO
Year of Publication 25.01.2024
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Year of Publication 25.01.2024
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE, UCHIDA KENGO
Year of Publication 22.09.2023
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Year of Publication 22.09.2023
Patent
SENSOR AND ELECTRONIC APPARATUS
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, MIYAZAKI FUMITO, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 25.10.2022
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Year of Publication 25.10.2022
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, ONO DAIKI, TOMIZAWA YASUSHI, MIYAZAKI FUMITO, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 07.09.2022
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Year of Publication 07.09.2022
Patent
SENSOR AND ELECTRONIC DEVICE
KAJI SHIORI, MASUNISHI KATSURA, ONO DAIKI, TOMIZAWA YASUSHI, MIYAZAKI FUMITO, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 06.09.2022
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Year of Publication 06.09.2022
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 29.08.2022
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Year of Publication 29.08.2022
Patent
SENSOR AND ELECTRONIC DEVICE
KAJI SHIORI, MASUNISHI KATSURA, ONO DAIKI, TOMIZAWA YASUSHI, MIYAZAKI FUMITO, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE, UCHIDA KENGO
Year of Publication 29.05.2023
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Year of Publication 29.05.2023
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 18.05.2022
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Year of Publication 18.05.2022
Patent
SENSOR AND ELECTRONIC APPARATUS
MASUNISHI KATSURA, KAJI SHIORI, ONO DAIKI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE, UCHIDA KENGO
Year of Publication 14.03.2023
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Year of Publication 14.03.2023
Patent
SENSOR AND ELECTRONIC DEVICE
MASUNISHI KATSURA, KAJI SHIORI, TOMIZAWA YASUSHI, OGAWA ETSUJI, MIYAZAKI FUMITO, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
Patent
SENSOR
KAJI SHIORI, MASUNISHI KATSURA, TOMIZAWA YASUSHI, OGAWA ETSUJI, HIRAGA HIROKI, GANDO RYUNOSUKE
Year of Publication 15.02.2021
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Year of Publication 15.02.2021
Patent
SENSOR DEVICE
IKEHASHI TAMIO, TOMIZAWA YASUSHI, OGAWA ETSUJI, GANDO RYUNOSUKE, MAEDA SHUNTA
Year of Publication 04.04.2019
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Year of Publication 04.04.2019
Patent