The 2017 Plasma Roadmap: Low temperature plasma science and technology
Adamovich, I, Baalrud, S D, Bogaerts, A, Bruggeman, P J, Cappelli, M, Colombo, V, Czarnetzki, U, Ebert, U, Eden, J G, Favia, P, Graves, D B, Hamaguchi, S, Hieftje, G, Hori, M, Kaganovich, I D, Kortshagen, U, Kushner, M J, Mason, N J, Mazouffre, S, Thagard, S Mededovic, Metelmann, H-R, Mizuno, A, Moreau, E, Murphy, A B, Niemira, B A, Oehrlein, G S, Petrovic, Z Lj, Pitchford, L C, Pu, Y-K, Rauf, S, Sakai, O, Samukawa, S, Starikovskaia, S, Tennyson, J, Terashima, K, Turner, M M, van de Sanden, M C M, Vardelle, A
Published in Journal of physics. D, Applied physics (14.07.2017)
Published in Journal of physics. D, Applied physics (14.07.2017)
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Journal Article
Atmospheric pressure plasma treatment of lipopolysaccharide in a controlled environment
Bartis, E A J, Graves, D B, Seog, J, Oehrlein, G S
Published in Journal of physics. D, Applied physics (07.08.2013)
Published in Journal of physics. D, Applied physics (07.08.2013)
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Journal Article
Surface chemistry studies of copper chemical mechanical planarization
HERNANDEZ, J, WRSCHKA, P, OEHRLEIN, G. S
Published in Journal of the Electrochemical Society (01.07.2001)
Published in Journal of the Electrochemical Society (01.07.2001)
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Journal Article
Atomic Layer Etching at the Tipping Point: An Overview
Oehrlein, G. S., Metzler, D., Li, C.
Published in ECS journal of solid state science and technology (01.01.2015)
Published in ECS journal of solid state science and technology (01.01.2015)
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Journal Article
Deactivation of lipopolysaccharide by Ar and H2 inductively coupled low-pressure plasma
Bartis, E A J, Barrett, C, Chung, T-Y, Ning, N, Chu, J-W, Graves, D B, Seog, J, Oehrlein, G S
Published in Journal of physics. D, Applied physics (29.01.2014)
Published in Journal of physics. D, Applied physics (29.01.2014)
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Journal Article
Electron, ion and vacuum ultraviolet photon effects in 193 nm photoresist surface roughening
Chung, T-Y, Nest, D, Graves, D B, Weilnboeck, F, Bruce, R L, Oehrlein, G S, Wang, D, Li, M, Hudson, E A
Published in Journal of physics. D, Applied physics (14.07.2010)
Published in Journal of physics. D, Applied physics (14.07.2010)
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Journal Article
Chemical mechanical planarization of copper damascene structures
WRSCHKA, P, HERNANDEZ, J, OEHRLEIN, G. S, KING, J
Published in Journal of the Electrochemical Society (01.02.2000)
Published in Journal of the Electrochemical Society (01.02.2000)
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Journal Article
Relationship between nanoscale roughness and ion-damaged layer in argon plasma exposed polystyrene films
Bruce, R. L., Weilnboeck, F., Lin, T., Phaneuf, R. J., Oehrlein, G. S., Long, B. K., Willson, C. G., Vegh, J. J., Nest, D., Graves, D. B.
Published in Journal of applied physics (15.04.2010)
Published in Journal of applied physics (15.04.2010)
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Journal Article
Role of polymer structure and ceiling temperature in polymer roughening and degradation during plasma processing: a beam system study of P4MS and PαMS
Nest, D, Chung, T-Y, Végh, J J, Graves, D B, Bruce, R L, Lin, T, Phaneuf, R J, Oehrlein, G S, Long, B K, Willson, C G
Published in Journal of physics. D, Applied physics (03.03.2010)
Published in Journal of physics. D, Applied physics (03.03.2010)
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Journal Article
Development of a slurry employing a unique silica abrasive for the CMP of Cu damascene structures
WRSCHKA, P, HERNANDEZ, J, OEHRLEIN, G. S, NEGRYCH, J. A, HAAG, G, RAU, P, CURRIE, J. E
Published in Journal of the Electrochemical Society (01.06.2001)
Published in Journal of the Electrochemical Society (01.06.2001)
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Journal Article
ToF-SIMS and AFM studies of low- k dielectric etching in fluorocarbon plasmas
Lazzeri, P., Hua, X., Oehrlein, G., Iacob, E., Barozzi, M., Bersani, M., Anderle, M.
Published in Applied surface science (30.07.2006)
Published in Applied surface science (30.07.2006)
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Journal Article
Conference Proceeding
Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics
Lazzeri, P., Oehrlein, G.S., Stueber, G.J., McGowan, R., Busch, E., Pederzoli, S., Jeynes, C., Bersani, M., Anderle, M.
Published in Thin solid films (01.04.2008)
Published in Thin solid films (01.04.2008)
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Journal Article
Conference Proceeding