by Rochlitz, L., Steinberger, M., Oechsner, R., Weber, A., Schmitz, S., Schillinger, K., Wolff, M., Bayler, A.
Published in International journal of hydrogen energy (21.06.2019)

by Svintsov, D. A., Vyurkov, V. V., Lukichev, V. F., Orlikovsky, A. A., Burenkov, A., Oechsner, R.
Published in Semiconductors (Woodbury, N.Y.) (01.02.2013)

by Nutsch, A, Oechsner, R, Schoepka, U, Pfitzner, L
Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)

by Oechsner, R., Pfeffer, M., Frickinger, J., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef, M., Murphy, B., Walther, H., Hury, S.
Published in IEEE transactions on semiconductor manufacturing (01.08.2007)

by Kozlowska, M., Oechsner, R., Pfeffer, M., Bauer, A. J., Meissner, E., Pfitzner, L., Ryssel, H., Maass, W., Langer, J., Ocker, B., Schmidbauer, S., Gonchond, J.-P.
Published in E-journal of surface science and nanotechnology (01.01.2009)

by Nutsch, Andreas, Oechsner, R.
Published in ECS transactions (28.04.2006)

by Pfeffer, M., Oechsner, R., Pfitzner, L., Eckert, S., Hartmann, A., Gold, H., Biebl, G., Kaspar, J.
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)

by Oechsner, Richard, Pfeffer, Markus, Pfitzner, Lothar, Binder, Harald, Müller, Eckhard, Vonderstrass, Thomas
Published in Materials science in semiconductor processing (01.08.2002)

by Pfitzner, Lothar, Schellenberger, M., Oechsner, R., Roeder, G., Pfeffer, M.
Published in ECS transactions (28.04.2006)

by Kasko, I., Oechsner, R., Schneider, C., Pfitzner, L., Ryssel, H., Foreschle, B.
Published in 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) (1997)

by Pfitzner, Lothar, Nutsch, Andreas, Oechsner, Richard, Pfeffer, Markus, Don, Eric, Wyon, Christophe, Hurlebaus, Matthias
Published in ECS transactions (28.09.2007)

by Oechsner, R, Pfeffer, M, Frickinger, J, Schellenberger, M, Roeder, G, Pfitzner, L, Ryssel, H, Fritzsche, M, Kaushik, V, Renaud, D, Danel, A, Claeys, C, Bearda, T, Lering, M, Graef, M, Murphy, B, Walther, H, Hury, S
Published in IEEE transactions on semiconductor manufacturing (01.08.2007)

by Svorcík, V, Walachová, K, Prosková, K, Dvoránková, B, Vogtová, D, Ochsner, R, Ryssel, H
Published in Journal of materials science. Materials in medicine (01.10.2000)

by Oechsner, R., Frickinger, J., Pfeffer, M., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef, M., Murphy, B., Walther, H., Hury, S.
Published in 2006 IEEE International Symposium on Semiconductor Manufacturing (01.09.2006)

by Pfitzner, Lothar, Oechsner, Richard, Schneider, Claus, Ryssel, Heiner, Riemer, Manfred, von Podewils, Mario
Published in Microelectronic engineering (01.07.1999)

by Frickinger, J., Oechsner, R., Schellenberger, M., Pfeffer, M., Pfitzner, L., Ryssel, H., Claeys, C., Claes, M., Bearda, T., Renaud, D., Danel, A., Lering, M., Graef, M., Kaushik, V., Murphy, B., Fritzsche, M., Walther, H., Hury, S.
Published in IFAC Proceedings Volumes (2006)

by OECHSNER, MATTHIAS DR, MALOW, THOMAS DR
Year of Publication 18.03.2015

by OECHSNER, MATTHIAS DR, MALOW, THOMAS DR
Year of Publication 18.03.2015

by OECHSNER, MATTHIAS DR, MALOW, THOMAS DR
Year of Publication 16.11.2011

by OECHSNER, MATTHIAS DR, MALOW, THOMAS DR
Year of Publication 16.11.2011