Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
Kozyrev, A. V., Sochugov, N. S., Oskomov, K. V., Zakharov, A. N., Odivanova, A. N.
Published in Plasma physics reports (01.07.2011)
Published in Plasma physics reports (01.07.2011)
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Journal Article
Study of the plasma parameters in a high-current pulsed magnetron sputtering system
Odivanova, A. N., Podkovyrov, V. G., Sochugov, N. S., Oskomov, K. V.
Published in Plasma physics reports (01.03.2011)
Published in Plasma physics reports (01.03.2011)
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Journal Article