Dry patterning through masks of organic materials
Tochitsky, E.I., Obukhov, E.I., Sharendo, A.I., Boksha, V.V., Kasparov, K.N.
Published in Vacuum (1991)
Published in Vacuum (1991)
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Journal Article
Dry patterning through masks of organic materials
TOCHITSKY, E. I, OBUKHOV, E. I, SHARENDO, A. I, BOKSHA, V. V, KASPAROV, K. N
Published in Vacuum (1990)
Get full text
Published in Vacuum (1990)
Conference Proceeding