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SILICON OXIDE FILM FORMING METHOD AND APPARATUS

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

by KUROKAWA MASAKI, OBU TOMOYUKI
Year of Publication 14.01.2014

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Patent

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

by KUROKAWA MASAKI, OBU TOMOYUKI
Year of Publication 07.01.2014

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Patent

SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM APPARATUS

SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM APPARATUS

by KIMURA NORIFUMI, OBU TOMOYUKI, IKEUCHI TOSHIYUKI
Year of Publication 08.10.2014

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Patent

METHOD OF MANUFACTURING LAMINATED SEMICONDUCTOR ELEMENT, LAMINATED SEMICONDUCTOR ELEMENT, AND APPRATUS OF MANUFACTURING LAMINATED SEMICONDUCTOR ELEMENT

METHOD OF MANUFACTURING LAMINATED SEMICONDUCTOR ELEMENT, LAMINATED SEMICONDUCTOR ELEMENT, AND APPRATUS OF MANUFACTURING LAMINATED SEMICONDUCTOR ELEMENT

by KUROKAWA MASAKI, HASEBE KAZUHIDE, OBU TOMOYUKI
Year of Publication 01.10.2014

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Patent

SEED LAYER FORMING METHOD, SILICON FILM FORMING METHOD AND FILM FORMING APPARATUS

SEED LAYER FORMING METHOD, SILICON FILM FORMING METHOD AND FILM FORMING APPARATUS

by NAGATA TOMOYUKI, MIYAHARA TAKAHIRO, OBU TOMOYUKI
Year of Publication 07.07.2014

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Patent

SILICON FILM FORMING METHOD AND APPARATUS

SILICON FILM FORMING METHOD AND APPARATUS

by NAGATA TOMOYUKI, MIYAHARA TAKAHIRO, OBU TOMOYUKI
Year of Publication 07.07.2014

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Patent

METHOD OF FORMING LAMINATED FILM AND FORMING APPARATUS THEREOF

METHOD OF FORMING LAMINATED FILM AND FORMING APPARATUS THEREOF

by KUROKAWA MASAKI, OBU TOMOYUKI, IRIUDA HIROKI
Year of Publication 27.03.2014

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Patent

METHOD AND APPARATUS OF FORMING CARBON FILM

METHOD AND APPARATUS OF FORMING CARBON FILM

by OTSUKA TAKEHIRO, MIZUNAGA SATOSHI, OBU TOMOYUKI
Year of Publication 17.01.2014

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Patent

SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS

SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS

by ITABASHI KEN, KUROKAWA MASAKI, TAKEUCHI YASUSHI, OBU TOMOYUKI, IRIUDA HIROKI
Year of Publication 19.09.2014

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Patent

Three-dimensional memory devices containing structures for controlling gate-induced drain leakage current and method of making the same

Three-dimensional memory devices containing structures for controlling gate-induced drain leakage current and method of making the same

by Obu, Tomoyuki, Miyake, Daisuke
Year of Publication 21.09.2021

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Patent

Three-dimensional memory devices containing structures for controlling gate-induced drain leakage current and method of making the same

Three-dimensional memory devices containing structures for controlling gate-induced drain leakage current and method of making the same

by Obu, Tomoyuki, Yada, Shinsuke
Year of Publication 14.09.2021

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Patent

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

by YADA, Shinsuke, OBU, Tomoyuki
Year of Publication 02.09.2021

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Patent

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

by MIYAKE, Daisuke, OBU, Tomoyuki
Year of Publication 26.08.2021

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Patent

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

THREE-DIMENSIONAL MEMORY DEVICES CONTAINING STRUCTURES FOR CONTROLLING GATE-INDUCED DRAIN LEAKAGE CURRENT AND METHOD OF MAKING THE SAME

by YADA, Shinsuke, OBU, Tomoyuki
Year of Publication 26.08.2021

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Patent

Three-dimensional memory device containing fluorine-free tungsten-word lines and methods of manufacturing the same

Three-dimensional memory device containing fluorine-free tungsten-word lines and methods of manufacturing the same

by Obu, Tomoyuki, Hinoue, Tatsuya
Year of Publication 12.03.2019

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Patent

Metal-Assisted Solid-Phase Crystallization Process for Vertical Monocrystalline Si Channel in 3D Flash Memory

Metal-Assisted Solid-Phase Crystallization Process for Vertical Monocrystalline Si Channel in 3D Flash Memory

by Miyagawa, Hidenori, Fujiwara, Makoto, Mitani, Yuichiro, Obu, Tomoyuki, Aochi, Hideaki, Kusai, Haruka, Takaishi, Riichiro, Kawai, Tomoya, Kamimuta, Yuuichi, Murakami, Toshiya, Ariyoshi, Keiko, Asano, Takanori, Goto, Masakazu
Published in 2019 IEEE International Electron Devices Meeting (IEDM) (01.12.2019)

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Conference Proceeding

Silicon oxide film forming method and apparatus

Silicon oxide film forming method and apparatus

by KUROKAWA MASAKI, OBU TOMOYUKI
Year of Publication 14.04.2015

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Patent

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

by KUROKAWA MASAKI, OBU TOMOYUKI
Year of Publication 09.01.2014

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Patent

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

SILICON OXIDE FILM FORMING METHOD AND APPARATUS

by KUROKAWA MASAKI, OBU TOMOYUKI
Year of Publication 02.01.2014

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Patent

Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same

Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same

by Obu, Tomoyuki, Sharangpani, Rahul, Zhou, Fei, Hinoue, Tatsuya, Rajashekhar, Adarsh, Makala, Raghuveer S, Uno, Tomohiro, Mukae, Yusuke
Year of Publication 04.01.2022

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Patent