Preparation of (Pb, La) (Zr, Ti)O3 ferroelectric films by RF sputtering on large substrate
SUU, K, OSAWA, A, TANI, N, ISHIKAWA, M, NAKAMURA, K, OZAWA, T, SAMESHIMA, K, KAMISAWA, A, TAKASU, H
Published in Japanese journal of applied physics (1996)
Published in Japanese journal of applied physics (1996)
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