Rapid thermal nitridation of SiO2 films
Oude Elferink, J.B., Habraken, F.H.P.M., Van Der Weg, W.F., Dooms, E., Heyns, M., De Keersmaecker, R.
Published in Applied surface science (01.10.1989)
Published in Applied surface science (01.10.1989)
Get full text
Journal Article