Effect of SiO[sub 2] Thickness on Dielectric Breakdown Defect Density Due to Surface Crystal-Originated Particles
Yamabe, Kikuo, Shimada, Yasuhiro, Piao, Min, Yamazaki, Tohru, Otsuki, Tsuyoshi, Takeda, Ryuji, Ohta, Yasumitsu, Jimbo, Susumu, Watanabe, Masaharu
Published in Journal of the Electrochemical Society (2003)
Published in Journal of the Electrochemical Society (2003)
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Journal Article
Effect of SiO2 thickness on dielectric breakdown defect density due to surface crystal-originated particles
YAMABE, Kikuo, SHIMADA, Yasuhiro, MIN PIAO, YAMAZAKI, Tohru, OTSUKI, Tsuyoshi, TAKEDA, Ryuji, OHTA, Yasumitsu, JIMBO, Susumu, WATANABE, Masaharu
Published in Journal of the Electrochemical Society (01.03.2003)
Published in Journal of the Electrochemical Society (01.03.2003)
Get full text
Journal Article