PIEZOELECTRIC THIN FILM DEVICE AND METHOD OF PRODUCING THE SAME
MATSUZAKI, SAKAE, NISHIMURA, KOSUKE, YAMADA, TETSUO, OTANI, OSAMU, NAGAO, KEIGO
Year of Publication 14.10.2004
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Year of Publication 14.10.2004
Patent
New device structure using array transistors and flexible U-grooves suitable for 18-V, high-performance SOI complementary bipolar LSIs
Tamaki, Y., Tsuji, K., Otani, O., Nonami, H., Tomatsuri, T., Yoshida, E., Hamamoto, M., Nakazato, N.
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
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