Search Results - "OSTER, Jens" :: K.UTB vyhledávací portál

Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO) 6 )

by Shih, Po-Yuan, Cipriani, Maicol, Hermanns, Christian Felix, Oster, Jens, Edinger, Klaus, Gölzhäuser, Armin, Ingólfsson, Oddur
Published in Beilstein journal of nanotechnology (04.02.2022)

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포토리소그래피 마스크의 결함을 처리하기 위한 복구 형상을 확인하기 위한 방법 및 장치

by WAIBLINGER MARKUS, OSTER JENS
Year of Publication 22.10.2019

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Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition

by Shih, Po-Yuan, Tafrishi, Reza, Cipriani, Maicol, Hermanns, Christian Felix, Oster, Jens, Gölzhäuser, Armin, Edinger, Klaus, Ingólfsson, Oddur
Published in Physical chemistry chemical physics : PCCP (20.04.2022)

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입자 빔으로 샘플을 분석 및/또는 처리하는 장치 및 방법

by HOFMANN THORSTEN, BUDACH MICHAEL, AUTH NICOLE, OSTER JENS
Year of Publication 03.05.2023

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APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBSTRATE

by SIELAFF TILO, HERMANNS CHRISTIAN FELIX, EDINGER KLAUS, BAUR CHRISTOF, OSTER JENS, KOMPANIIETS MAKSYM
Year of Publication 26.08.2024

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METHOD DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT

by BUDACH MICHAEL, BAUR CHRISTOF, OSTER JENS, SCHONEBERG JOHANNES
Year of Publication 05.10.2022

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Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)6)

by Shih, Po-Yuan, Cipriani, Maicol, Hermanns, Christian Felix, Oster, Jens, Edinger, Klaus, Gölzhäuser, Armin, Ingólfsson, Oddur
Published in Beilstein journal of nanotechnology (01.01.2022)

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APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBSTRATE

by SIELAFF TILO, HERMANNS CHRISTIAN FELIX, EDINGER KLAUS, BAUR CHRISTOF, OSTER JENS, KOMPANIIETS MAKSYM
Year of Publication 17.01.2022

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METHOD AND DEVICE FOR PERMANENTLY REPAIRING DEFECTS OF ABSENT MATERIAL OF A PHOTOLITHOGRAPHIC MASK

by BRET TRISTAN, SCHNEIDER HORST, HOFMANN THORSTEN, KORNILOV KINGA, OSTER JENS
Year of Publication 05.09.2017

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High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted α-Al 2 O 3

by Wiehl, Leonore, Oster, Jens, Huth, Michael
Published in Journal of applied crystallography (01.04.2005)

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High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted [alpha]-Al2O3

by Wiehl, Leonore, Oster, Jens, Huth, Michael
Published in Journal of applied crystallography (01.04.2005)

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Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask

by Oster, Jens, Waiblinger, Markus
Year of Publication 03.08.2021

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$Thermally induced emission of light from a metallic diffraction grating, mediated by surface plasmons$

Thermally induced emission of light from a metallic diffraction grating, mediated by surface plasmons

by Kreiter, Maximilian, Oster, Jens, Sambles, Roy, Herminghaus, Stephan, Mittler-Neher, Silvia, Knoll, Wolfgang
Published in Optics communications (01.09.1999)

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