Optimizing high concentration Scandium Aluminum Nitride films
Mishin, Sergey, Oshmyansky, Yury
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
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Conference Proceeding
Reducing Impact of Stress on Coupling Coefficient in 30% Scandium Aluminum Nitride Films
Mishin, Sergey, Oshmyansky, Yury
Published in 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (15.05.2023)
Published in 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (15.05.2023)
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Conference Proceeding
Magnetron Deposition of AlN and ScAlN for Mass-production for BAW Devices and MEMS
Mishin, Sergey, Oshmyansky, Yury
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
Stress Control for Highly Doped Aluminum Scandium Nitride Films
Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
Investigation of 20% scandium-doped aluminum nitride films for MEMS laterally vibrating resonators
Colombo, Luca, Kochhar, Abhay, Changting Xu, Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding
Improving coupling coefficient distribution on BAW filters manufactured on 200mm wafers
Mishin, Sergey, Oshmyansky, Yury
Published in 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (01.07.2017)
Published in 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (01.07.2017)
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Conference Proceeding
Improving manufacturability of FBAR filters on 200mm wafers
Mishin, Sergey, Oshmyansky, Yury
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
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Conference Proceeding
Super High Frequency Simple Process Flow Cross-Sectional Lamé Mode Resonators in 20% Scandium-Doped Aluminum Nitride
Schaffer, Zachary A., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
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Conference Proceeding
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
Schaffer, Zachary A., Colombo, Luca, Kochhar, Abhay S., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
A film bulk acoustic resonator (FBAR) duplexer for USPCS handset applications
Bradley, P., Ruby, R., Larson, J.D., Oshmyansky, Y., Figueredo, D.
Published in 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157) (2001)
Published in 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157) (2001)
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Conference Proceeding
Journal Article
Investigation of 20% Scandium-doped Aluminum Nitride films for MEMS laterally vibrating resonators
Colombo, Luca, Kochhar, Abhay, Changting Xu, Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding
Thickness control by ion beam milling in acoustic resonator devices
Mishin, Sergey, Oshmyansky, Yury, Bi, Frank
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
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Conference Proceeding
High coupling coefficient Temperature compensated FBAR resonator for oscillator application with wide pulling range
Qiang Zou, Lee, Donald, Bi, Frank, Ruby, Richard, Small, Martha, Ortiz, Steve, Oshmyansky, Yury, Kaitila, Jyrki
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
Published in 2010 IEEE International Frequency Control Symposium (01.06.2010)
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Conference Proceeding