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"OSHINO TETSUYA"
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"OSHINO TETSUYA"
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REFLECTIVE RETICLE AND ITS MANUFACTURING METHOD
by
OSHINO TETSUYA
Year of Publication
09.08.2007
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EUV EXPOSURE DEVICE
by
OSHINO TETSUYA
Year of Publication
12.07.2007
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PROJECTION OPTICAL SYSTEM, PROJECTION EXPOSING DEVICE, AND EXPOSURE METHOD
by
OSHINO TETSUYA
Year of Publication
26.04.2007
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MIRROR MOUNTING STRUCTURE, PROJECTION OPTICAL SYSTEM, AND ALIGNER
by
OSHINO TETSUYA
Year of Publication
26.04.2007
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MANUFACTURING METHOD FOR OPTICAL SYSTEM AND EUV EXPOSURE SYSTEM
by
OSHINO TETSUYA
Year of Publication
19.10.2006
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MANUFACTURING METHOD OF PROJECTIVE OPTICAL SYSTEM FOR EUV EXPOSURE APPARATUS, AND EUV EXPOSURE APPARATUS
by
OSHINO TETSUYA
Year of Publication
28.09.2006
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ALIGNER AND METHOD FOR MANUFACTURING MICRO DEVICE
by
OSHINO TETSUYA
Year of Publication
18.05.2006
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X-RAY PROJECTION EXPOSURE DEVICE, X-RAY PROJECTION EXPOSURE METHOD, AND SEMICONDUCTOR DEVICE
by
OSHINO
,
TETSUYA
Year of Publication
15.03.2006
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ILLUMINATION OPTICAL APPARATUS, ALIGNER, AND DEVICE MANUFACTURING METHOD
by
OSHINO TETSUYA
,
KAWABE YOSHIO
Year of Publication
14.04.2011
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MIRROR AND EXPOSURE APPARATUS
by
OSHINO TETSUYA
Year of Publication
27.10.2005
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31
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Device and methods for holding an optical element with reduced stress inside and outside an optical column
by
OSHINO
,
TETSUYA
Year of Publication
15.06.2005
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32
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NON-SPHERICAL SHAPE MEASURING METHOD AND NON-SPHERICAL SHAPE MEASURING ARRANGEMENT
by
OSHINO TETSUYA
Year of Publication
21.04.2005
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33
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Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element
by
Oshino
,
Tetsuya
Year of Publication
12.04.2005
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34
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Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element
by
OSHINO TETSUYA
Year of Publication
12.04.2005
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EXTREME ULTRAVIOLET RAY OPTICAL SYSTEM AND EXPOSURE DEVICE
by
OSHINO TETSUYA
Year of Publication
31.03.2005
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MIRROR, MIRROR WITH TEMPERATURE ADJUSTMENT MECHANISM, AND EXPOSURE APPARATUS
by
OSHINO TETSUYA
Year of Publication
03.03.2005
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X-ray projection-exposure apparatus and methods providing improved layer overlay accuracy
by
OSHINO TETSUYA
Year of Publication
09.11.2004
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38
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X-ray projection exposure device, X-ray projection exposure method, and semiconductor device
by
Oshino
,
Tetsuya
Year of Publication
09.11.2004
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EUV OPTICAL SYSTEM AND EUV EXPOSURE DEVICE
by
OSHINO TETSUYA
Year of Publication
16.09.2004
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METHOD OF INSPECTING EXTREME ULTRAVIOLET OPTICAL BARREL, EXTREME ULTRAVIOLET REFLECTION OPTICAL ELEMENT, EXPOSURE SYSTEM, AND EXTREME ULTRAVIOLET OPTICAL SYSTEM
by
OSHINO TETSUYA
Year of Publication
27.05.2004
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