Hydrogen plasma etching method for depth analysis by x-ray photoelectron spectroscopy
Iijima, Yoshitoki, Tazawa, Toyohiko, Sato, Kazuomi, Oshima, Mitsuyoshi, Hiraoka, Kenzo
Published in Surface and interface analysis (01.09.2000)
Published in Surface and interface analysis (01.09.2000)
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