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DEVICES, SYSTEMS, AND METHODS OF GENERATING AND PROVIDING A TARGET TOPOGRAPHIC MAP FOR FINISHING A PHOTOMASK BLANK
SUBJECT
TO FUNCTIONAL REQUIREMENTS ON FLATNESS
by
ARONSTEIN, David L
,
BALLMAN, Katherine Nicole
,
LEE, Christopher Alan
Year of Publication
04.10.2023
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DEVICES, SYSTEMS, AND METHODS OF GENERATING AND PROVIDING A TARGET TOPOGRAPHIC MAP FOR FINISHING A PHOTOMASK BLANK
SUBJECT
TO FUNCTIONAL REQUIREMENTS ON FLATNESS
by
ARONSTEIN, David L
,
BALLMAN, Katherine Nicole
,
LEE, Christopher Alan
Year of Publication
03.08.2022
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Devices, systems, and methods of generating and providing a target topographic map for finishing a photomask blank
subject
to functional requirements on flatness
by
Aronstein, David L
,
Lee, Christopher Alan
,
Ballman, Katherine Nicole
Year of Publication
10.01.2023
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High-speed nanopatterning method and apparatus of two-color super-resolution photolithography
by
Lee, Dong-Ryoung
Year of Publication
08.07.2025
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PHOTORESIST-FREE OPTICAL PATTERNING METHOD FOR COLLOIDAL NANOCRYSTALS IN GREEN SOLVENT
by
WANG, Yuanyuan
,
XIAO, Pengwei
,
LUO, Huanhuan
,
ZHANG, Zhoufan
Year of Publication
09.07.2025
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Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process
by
Van Berkel, Koos
,
Schneiders, Mauritius Gerardus Elisabeth
,
Dolk, Victor Sebastiaan
Year of Publication
24.06.2025
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MEASUREMENT OPTICAL SYSTEM FOR METROLOGY INSPECTION AND METHOD OF MEASURING OVERLAY USING THE SAME
by
HAN, Seunghoon
,
JANG, Jaeduck
,
SHIN, Changgyun
,
CHOI, Kyuhwan
Year of Publication
13.03.2025
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METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF
by
COTTAAR, Jeroen
Year of Publication
12.06.2025
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DEVICES, SYSTEMS, AND METHODS OF GENERATING AND PROVIDING A TARGET TOPOGRAPHIC MAP FOR FINISHING A PHOTOMASK BLANK
SUBJECT
TO FUNCTIONAL REQUIREMENTS ON FLATNESS
by
ARONSTEIN, David L
,
BALLMAN, Katherine Nicole
,
LEE, Christopher Alan
Year of Publication
01.04.2021
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PHOTORESIST-FREE OPTICAL PATTERNING METHOD FOR COLLOIDAL NANOCRYSTALS IN GREEN SOLVENT
by
WANG, Yuanyuan
,
XIAO, Pengwei
,
LUO, Huanhuan
,
ZHANG, Zhoufan
Year of Publication
22.05.2025
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LITHOGRAPHY COMPOSITIONS AND METHODS OF USE THEREOF FOR SUSTAINABLE AND GREENER SOLUTIONS FOR EDGE PROTECTION LAYERS
by
KUDO, Takanori
,
LI, Zhong
Year of Publication
03.04.2025
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PROCESSES FOR PHOTORESIST MATERIAL DEPOSITION
by
WREE, Jan-Lucas
,
COOPER, Alan C
,
IVANOV, Sergei V
Year of Publication
03.04.2025
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METHOD OF DETERMINING A SAMPLING SCHEME AND ASSOCIATED METROLOGY METHOD
by
WERKMAN, Roy
,
SELEN, Jori
,
DING, Jingqian
,
HAUPTMANN, Marc
Year of Publication
16.04.2025
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METHOD OF DETERMINING A SAMPLING SCHEME AND ASSOCIATED METROLOGY METHOD
by
WERKMAN, Roy
,
SELEN, Jori
,
DING, Jingqian
,
HAUPTMANN, Marc
Year of Publication
17.04.2025
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CHEMICAL SOLUTION
by
OHTSU, Akihiko
,
SAITO, Ryo
,
YOSHIDOME, Masahiro
,
KAMIMURA, Tetsuya
Year of Publication
23.01.2025
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POSITIVE TONE PATTERNS FROM METAL ORGANIC RESISTS
by
KUEBRA, Aydin
,
HUDSON, Daniel
,
PRADELLA, Jens
,
SCHENK, Thorsten
Year of Publication
13.02.2025
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METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF
by
COTTAAR, Jeroen
Year of Publication
05.02.2025
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Method for determining a measurement recipe and associated apparatuses
by
Tel, Wim Tjibbo
,
Van Leest, Adriaan Johan
Year of Publication
28.01.2025
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METROLOGY CALIBRATION METHOD
by
BOTTEGAL, Giulio
,
SANGUINETTI, Gonzalo Roberto
Year of Publication
16.01.2025
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Metrology method and apparatus, computer program and lithographic system
by
Turner, Paul Jonathan
,
Tsiatmas, Anagnostis
Year of Publication
22.10.2024
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