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Organometallic tin oxo carboxylate clusters with mixed organic ligands for EUV lithography
LICHTENBERGER, NIELS, HUDSON, DANIEL, SCHIMURA, LAURA, FACKLER, PHILIPP HANS, DAMMEL, RALPH R, YANG, DONG
Year of Publication 16.01.2025
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Year of Publication 16.01.2025
Patent
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Resin composition for forming phase-separated structure, and method for producing structure including phase-separated structure wherein the invention provides a resin composition for forming phase-separated structures, improving process margins with specific block copolymers A and B in a defined ratio
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Patent
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리소그래피 공정을 모니터링하는 방법
ANUNCIADO ROY, DILLEN HERMANUS ADRIANUS, VAN LAARHOVEN HENDRIK ADRIAAN, VERMA ALOK, VAN DER SANDEN STEFAN CORNELIS THEODORUS
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
Patent
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Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation
Inomiya Kenjin, Sumida Shinichi, Komoriya Haruhiko, Kanto Yusuke, Mori Takashi, Kitamoto Takamasa
Year of Publication 13.06.2017
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Year of Publication 13.06.2017
Patent
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Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation
Inomiya Kenjin, Sumida Shinichi, Komoriya Haruhiko, Kanto Yusuke, Mori Takashi, Kitamoto Takamasa
Year of Publication 13.06.2017
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Year of Publication 13.06.2017
Patent
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Method for fabricating transfer printing substrate using concave-convex structure, transfer printing substrate fabricated thereby and application thereof
Noh Byeong-Il, Chun Jaeyi, Yun Su Ok, Kim Seok Ho, Park Seong-Ju, Yoon Jongwon, Ko Heung Cho, Hwang Young Kyu, Jang Hun Soo, Cho Hyun-A
Year of Publication 23.05.2017
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Year of Publication 23.05.2017
Patent
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