A substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method
OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, GARCIA GRANDA, MIGUEL, CRAMER, HUGO AUGUSTINUS JOSEPH, VAN DER SCHAAR, MAURITS, VAN DEN BOS, KAREL HENDRIK WOUTER
Year of Publication 16.10.2023
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Year of Publication 16.10.2023
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An apparatus for operating a light beam, an optical source for semiconductor lithography, and a photolithography exposure apparatus
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Year of Publication 01.04.2021
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Year of Publication 01.04.2021
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LITHOGRAPHIC APPARATUS AND METHOD
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Year of Publication 19.01.2017
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Year of Publication 19.01.2017
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Electron injector and free electron laser
Nikipelov Andrey Alexandrovich, Frijns Olav Waldemar Vladimir, Bartraij Petrus Rutgerus, Katalenic Andelko, Banine Vadim Yevgenyevich, Loopstra Erik, De Vries Gosse Charles, De Jager Pieter Willem Herman, Engelen Wouter Joep, Grimminck Leonardus Adrianus Gerardus, Op'T Root Wilhelmus Patrick Elisabeth Maria, Akkermans Johannes Antonius Gerardus, Coenen Teis Johan
Year of Publication 08.08.2017
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Year of Publication 08.08.2017
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Reducing speckle in an excimer light source
GODFRIED, HERMAN PHILIP, OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, EVERTS, FRANK, DUFFEY, THOMAS PATRICK, KING, BRIAN EDWARD, THORNES, JOSHUA JON
Year of Publication 01.09.2018
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Year of Publication 01.09.2018
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Illumination system
GODFRIED HERMAN PHILIP, OP'T ROOT WILHELMUS PATRICK ELISABETH MARIA, VAN BUSSEL HUBERTUS PETRUS LEONARDUS HENRICA
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Electron injector and free electron laser
AKKERMANS, JOHANNES ANTONIUS GERARDUS, NIKIPELOV, ANDREY ALEXANDROVICH, LOOPSTRA, ERIK ROELOF, COENEN, TEIS JOHAN, BANINE, VADIM YEVGENYEVICH, FRIJNS, OLAV WALDEMAR VLADIMIR, DE JAGER, PIETER WILLEM HERMAN, BARTRAIJ, PETRUS RUTGERUS, OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, GRIMMINCK, LEONARDUS ADRIANUS GERARDUS, DE VRIES, GOSSE CHARLES, KATALENIC, ANDELKO, ENGELEN, WOUTER JOEP
Year of Publication 01.02.2019
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Year of Publication 01.02.2019
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Radiation source
GODFRIED, HERMAN PHILIP, OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, EVERTS, FRANK, STOLK, ROLAND PIETER, VAN DER VEEN, PAUL, BOMMER, ADRIANUS LEONARDUS GERTRUDUS, DE JONG, ROBERT
Year of Publication 11.10.2016
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Year of Publication 11.10.2016
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Radiation source
GODFRIED, HERMAN PHILIP, OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, EVERTS, FRANK, STOLK, ROLAND PIETER, VAN DER VEEN, PAUL, BOMMER, ADRIANUS LEONARDUS GERTRUDUS, DE JONG, ROBERT
Year of Publication 16.01.2015
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Year of Publication 16.01.2015
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Electron injector and free electron laser
AKKERMANS, JOHANNES ANTONIUS GERARDUS, NIKIPELOV, ANDREY ALEXANDROVICH, LOOPSTRA, ERIK ROELOF, COENEN, TEIS JOHAN, BANINE, VADIM YEVGENYEVICH, FRIJNS, OLAV WALDEMAR VLADIMIR, DE JAGER, PIETER WILLEM HERMAN, BARTRAIJ, PETRUS RUTGERUS, OP'T ROOT, WILHELMUS PATRICK ELISABETH MARIA, GRIMMINCK, LEONARDUS ADRIANUS GERARDUS, DE VRIES, GOSSE CHARLES, KATALENIC, ANDELKO, ENGELEN, WOUTER JOEP
Year of Publication 16.08.2015
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Year of Publication 16.08.2015
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