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Year of Publication 19.09.2024
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Year of Publication 22.04.2024
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Year of Publication 11.04.2024
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Year of Publication 08.03.2024
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PLASMA PROCESSING DEVICE AND PLASMA CONTROL METHOD
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Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD
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Year of Publication 12.01.2023
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PROCESS STATUS PREDICTION SYSTEM
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Year of Publication 22.12.2022
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Year of Publication 22.12.2022
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Year of Publication 06.06.2024
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Year of Publication 06.06.2024
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PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD
FUKUSHIMA, Takanori, OOWADA, Shin, ASAKO, Ryuichi, OGIWARA, Hibiki, YAMAGUCHI, Tatsuya, SHOJI, Yoshiaki, KAJITANI, Takashi
Year of Publication 26.09.2024
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Year of Publication 26.09.2024
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PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD
SAKAI, Osamu, MATSUKUMA, Masaaki, KAMATA, Eiki, IKEDA, Taro, OOWADA, Shin, KANEKO, Kazushi, KAWAKAMI, Satoru
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
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PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD
FUKUSHIMA, Takanori, OOWADA, Shin, ASAKO, Ryuichi, OGIWARA, Hibiki, YAMAGUCHI, Tatsuya, SHOJI, Yoshiaki, KAJITANI, Takashi
Year of Publication 15.05.2024
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Year of Publication 15.05.2024
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Surface observation method
SHIMURA, SATORU, OOWADA, SHIN, TANAKA, KAZUO, CHUJO, YOSHIKI, YUHARA, KAZUHIRO, ITO, SHUNICHIRO, ASAKO, RYUICHI
Year of Publication 01.08.2024
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Year of Publication 01.08.2024
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SHEET BEAM TEST APPARATUS
SAITO, MUTSUMI, OOWADA, SHIN, YOSHIKAWA, SHOJI, NOJI, NOBUHARU, KIMBA, TOSHIFUMI, KARIMATA, TSUTOMU, NAKASUJI, MAMORU, SATAKE, TOHRU, SOBUKAWA, HIROSI
Year of Publication 14.02.2002
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Year of Publication 14.02.2002
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ELECTRON BEAM DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION METHOD USING THE DEVICE
SAITO, MUTSUMI, YOSHIKAWA, SHOJI, OOWADA, SHIN, NOJI, NOBUHARU, WATANABE, KENJI, KIMBA, TOSHIFUMI, SATAKE, TOHRU, HAMASHIMA, MUNEKI, KATO, TAKAO, KARIMATA, TSUTOMU, HATAKEYAMA, MASAHIRO, NAKASUJI, MAMORU, SOBUKAWA, HIROSI
Year of Publication 20.06.2002
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Year of Publication 20.06.2002
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INSPECTION METHOD AND APPARATUS USING ELECTRON BEAM, AND DEVICE PRODUCTION METHOD USING IT
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Year of Publication 06.06.2002
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Year of Publication 06.06.2002
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WAFER INSPECTING METHOD, WAFER INSPECTING INSTRUMENT, AND ELECTRON BEAM APPARATUS
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Year of Publication 23.05.2002
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Year of Publication 23.05.2002
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ELECTRON BEAM APPARATUS AND DEVICE PRODUCTION METHOD USING THE APPARATUS
HAMASHIMA, MUNEKI, SAITO, MUTSUMI, YOSHIKAWA, SHOJI, OOWADA, SHIN, NOJI, NOBUHARU, KOHAMA, YOSHIAKI, KARIMATA, TSUTOMU, KIMBA, TOSHIFUMI, OKUBO, YUKIHARU, NAKASUJI, MAMORU, SATAKE, TOHRU, SOBUKAWA, HIROSI
Year of Publication 10.05.2002
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Year of Publication 10.05.2002
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The university of shiga prefecture
OOWADA, SHIN, KAWAKAMI, SATORU, SAKAI, OSAMU, KAMATA, EIKI, IKEDA, TARO, MATSUKUMA, MASAAKI, KANEKO, KAZUSHI
Year of Publication 01.07.2023
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Year of Publication 01.07.2023
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CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS
SAITO, MUTSUMI, HAMASHIMA, MUNEKI, YOSHIKAWA, SHOJI, OOWADA, SHIN, NOJI, NOBUHARU, KIMBA, TOSHIFUMI, KARIMATA, TSUTOMU, NAKASUJI, MAMORU, SATAKE, TOHRU, SOBUKAWA, HIROSI, TAKAGI, TORU
Year of Publication 03.01.2002
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Year of Publication 03.01.2002
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