VACUUM DEVICE AND THIN FILM FORMING METHOD USING IT
HAGA TORU, FUJISAKI YOSHIHISA, MIYATA TOSHIMITSU, OOMORI YOSHINORI, OKUMURA KENJI, OUCHI KIYOSHI
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Year of Publication 13.12.1994
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SEMICONDUCTOR CRYSTAL GROWTH DEVICE
FUJISAKI YOSHIHISA, HAGA TORU, MIYATA TOSHIMITSU, OOMORI YOSHINORI, OKUMURA KENJI, OUCHI KIYOSHI
Year of Publication 22.04.1994
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Year of Publication 22.04.1994
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