SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
TAMARU TSUYOSHI, SAITOU TATSUYUKI, NOGUCHI JYUNJI, IMAI TOSHINORI, OOHASHI NAOFUMI
Year of Publication 22.05.2003
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Year of Publication 22.05.2003
Patent
A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD OF MANUFACTURING THE SAME
TAMARU TSUYOSHI, SAITOU TATSUYUKI, NOGUCHI JYUNJI, IMAI TOSHINORI, OOHASHI NAOFUMI
Year of Publication 23.08.2007
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Year of Publication 23.08.2007
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Enhanced dielectric breakdown lifetime of the copper/silicon nitride/silicon dioxide structure
Takeda, K.-I., Hinode, K., Oodake, I., Oohashi, N., Yamaguchi, H.
Published in 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173) (1998)
Published in 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173) (1998)
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