Effect of Fluorine Atom on Acid Generation in Chemically Amplifiled EUV Resist
Yamamoto, Hiroki, Kozawa, Takahiro, Tagawa, Seiichi, Yukawa, Hiroto, Sato, Mitsuru, Onodera, Junichi
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
Published in 2007 Digest of papers Microprocesses and Nanotechnology (01.11.2007)
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