Verfahren zum Ätzen einer Metallschicht
KOBAYASHI, AKIRA, MUTO, MAKOTO, KASAI, MASARU, YOSHIMORI, TOMOAKI, NONAKA, MIKIO, ONODA, TOSHIYASU, HATTORI, KEI
Year of Publication 12.02.2004
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Year of Publication 12.02.2004
Patent
DRY ETCHING METHOD
JINBO SADAYUKI, YOSHIMORI HIROAKI, HATTORI KEI, MUTO MAKOTO, KOBAYASHI AKIRA, NONAKA MIKIO, ONODA TOSHIYASU, KASAI MASARU
Year of Publication 30.05.2000
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Year of Publication 30.05.2000
Patent
Metal film etching method
ONODA; TOSHIYASU, YOSHIMORI; TOMOAKI, NONAKA; MIKIO, HATTORI; KEI, KOBAYASHI; AKIRA, MUTO; MAKOTO, KASAI; MASARU
Year of Publication 08.12.1998
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Year of Publication 08.12.1998
Patent
ETCHING OF METAL FILM
YOSHIMORI HIROAKI, MUTO MAKOTO, HATTORI KEI, KOBAYASHI AKIRA, NONAKA MIKIO, ONODA TOSHIYASU, KASAI MASARU
Year of Publication 19.09.1997
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Year of Publication 19.09.1997
Patent
SPUTTERING DEVICE AND METHOD THEREFOR
WATANABE KANAME, UTSUNOMIYA NOBUAKI, OTA TOSHIHIKO, OMI KUNIO, MITANI NAOMI, ONODA TOSHIYASU
Year of Publication 17.09.1996
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Year of Publication 17.09.1996
Patent