Line selected F2 two chamber laser system
FOMENKOV IGOR V, SMITH SCOTT T, ERSHOV ALEXANDER I, PARTLO WILLIAM N, ONKELS ECKEHARD D, UJAZDOWSKI RICHARD C, HULBURD WILLIAM G, KNOWLES DAVID S, NESS RICHARD M, BROWN DANIEL J.W, MYERS DAVID W, SANDSTROM RICHARD L, RYLOV GERMAN E, BESAUCELE HERVE A
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
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Very narrow band, two chamber, high rep rate gas discharge laser system
ANDERSON STUART L, FOMENKOV IGOR V, SMITH SCOTT T, ERSHOV ALEXANDER I, PARTLO WILLIAM N, UJAZDOWSKI RICHARD C, ONKELS ECKEHARD D, HULBURD WILLIAM G, KNOWLES DAVID S, BROWN DANIEL J. W, NESS RICHARD M, MYERS DAVID W, SANDSTROM RICHARD L, DAS PALASH P, BESAUCELE HERVE A, OICLES JEFFREY
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
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VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE, GAS DISCHARGE LASER SYSTEM
DAVID W. MYERS, SCOTT T. SMITH, RICHARD M. NESS, HERVE A. BESAUCELE, WILLIAM G. HULBURD, DAVID S. KNOWLES, PALASH P. DAS, JEFFREY OICLES, IGOR V. FOMENKOV, DANIEL J.W. BROWN, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, WILLIAM N. PARTLO, RICHARD L. SANDSTROM, STUART L. ANDERSON, RICHARD C. UJAZDOWSKI
Year of Publication 29.01.2015
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Year of Publication 29.01.2015
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Very narrow band injection seeded f2 lithography laser
PALASH P. DAS, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, THOMAS HOFMANN, WILLIAM N. PARTLO
Year of Publication 30.04.2001
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Year of Publication 30.04.2001
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VERY NARROW BAND,TWO CHAMBER, HIGH REP RATE GAS DISCHARGE LASER SYSTEM
DAVID W. MYERS, SCOTT T. SMITH, RICHARD M. NESS, HERVE A. BESAUCELE, WILLIAM G. HULBURD, DAVID S. KNOWLES, PALASH P. DAS, JEFFREY OICLES, IGOR V. FOMENKOV, DANIEL J.W. BROWN, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, WILLIAM N. PARTLO, RICHARD L. SANDSTROM, STUART L. ANDERSON, RICHARD C. UJAZDOWSKI
Year of Publication 31.10.2008
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Year of Publication 31.10.2008
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Injection seeded F2 lithography laser
PALASH P DAS, RICHARD L SANDSTROM, ECKEHARD D. ONKELS, WILLIAM N PARTLO, ALEXANDER I. ERSHOV, THOMAS P. DUFFEY
Year of Publication 27.08.2001
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Year of Publication 27.08.2001
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High power gas discharge laser with line narrowing unit
PALASH P DAS, DANILO D. RICHARDSON, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, JESSE D. BUCK, RAYMOND F. CYBULSKI
Year of Publication 10.04.2001
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Year of Publication 10.04.2001
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Very narrow band, two chamber, high rep rate gas discharge laser system
DAVID W. MYERS, WILLIAM N PARTLO, DANIEL J. W. BROWN, RICHARD M. NESS, HERVE A. BESAUCELE, PALASH P DAS, XIAOJIANG J. PAN, IGOR V FOMENKOV, RICHARD L SANDSTROM, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, STUART L. ANDERSON, RICHARD C. UJAZDOWSKI
Year of Publication 22.04.2002
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Year of Publication 22.04.2002
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Gas discharge laser long life electrodes
ROBERT A. SHANNON, MICHAEL DU'LYEA, IGOR V FOMENKOV, B. FLEUROV VLADIMIR, MICHAEL C. CATES, ROSS H. WINNICK, RICHARD G. MORTON, ECKEHARD D. ONKELS, DMITRI V. GAIDARENKO, JEAN-MARC HUEBER
Year of Publication 24.12.2001
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Year of Publication 24.12.2001
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Line selected f?2? two chamber laser system
DAVID W. MYERS, SCOT T. SMITH, DANIEL J. W. BROWN, RICHARD M. NESS, GERMAN E. RYLOV, HERVE A. BESAUCELE, WILLIAM G. HULBURD, DAVID S. KNOWLES, IGOR V. FOMENKOV, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, WILLIAM N. PARTLO, RICHARD L. SANDSTROM, RICHARD C. UJAZDOWSKI
Year of Publication 18.03.2003
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Year of Publication 18.03.2003
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Very narrow band, two chamber, high rep rate gas discharge laser system
DAVID W. MYERS, SCOTT T. SMITH, DANIEL J. W. BROWN, RICHARD M. NESS, HERVE A. BESAUCELE, WILLIAM G. HULBURD, DAVID S. KNOWLES, PLASH P. DAS, JEFFREY OICLES, IGOR V. FOMENKOV, ECKEHARD D. ONKELS, ALEXANDER I. ERSHOV, RICHARD L. SANDSTROM, WILLIAM N. PARTLO, STUART L. ANDERSON, RICHARD C. UJAZDOWSKI
Year of Publication 18.03.2003
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Year of Publication 18.03.2003
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