Semiconductor device having oxidized metal film and manufacture method of the same
SAKATA ATSUKO, KATATA TOMIO, HATANO MASAAKI, YAMASHITA SOICHI, HIGASHI KAZUYUKI, WADA JUNICHI, KINOSHITA KAZUYA, HASUNUMA MASAHIKO, YAMADA MASAKI, OMOTO SEIICHI, NAKAMURA NAOFUMI
Year of Publication 28.09.2006
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Year of Publication 28.09.2006
Patent