Improved platen for electrostatic wafer clamping apparatus
UEHARA TOSHIO, KAWASHIMA NAOKI, MATSUBARA HIDEAKI, YANAGIDA HIROAKI, AOKI SHOJI, OKUHARA YOSHIKI
Year of Publication 01.07.2009
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Year of Publication 01.07.2009
Patent
CONCRETE PILE WITH CRACKING DETECTION FUNCTION CONTAINING FRP TYPE DETECTION MATERIAL AND METHOD OF CONFIRMING SOUNDNESS OF CONCRETE PILE AFTER GENERATION OF EARTHQUAKE USING THIS CONCRETE PILE
IMAI NOBUHIRO, NISHIMURA HITOSHI, SHINKAI YUKI, MATSUBARA HIDEAKI, YANAGIDA HIROAKI, SHIN SUMIMOTO, SUGIYAMA TAKESHI, OKUHARA YOSHIKI, AIKO YASUTOMI
Year of Publication 16.02.2001
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Year of Publication 16.02.2001
Patent