Heterogeneously Integrated Vapor-Liquid-Solid Grown Silicon Probes/(111) and Silicon MOSFETs/(100)
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Published in IEEE electron device letters (01.05.2011)
Published in IEEE electron device letters (01.05.2011)
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Journal Article
PRESSURE-SENSOR PACKAGE AND METHOD FOR PRODUCING SAME
ADACHI, YOSHITAKA, INOUE, KATSUYUKI, OKUGAWA, AKIHIRO, SHIMIZU, MASAO, KAI, TADASHI
Year of Publication 06.09.2013
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Year of Publication 06.09.2013
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Drucksensorgehäuse und Verfahren zu seiner Herstellung
Okugawa, Akihiro, Shimizu, Masao, Kai, Tadashi, Inoue, Katsuyuki, Adachi, Yoshitaka
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
Patent
Heterogeneous integration of vaporliquidsolid grown silicon microprobe arrays/(111) and MOSFETs/(100) using a silicon on insulator substrate
Okugawa, Akihiro, Mayumi, Kotaro, Kawano, Takeshi, Ishida, Makoto
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
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Conference Proceeding