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PVD A method of controlling the resistivity and stress of tungsten through PVD sputtering method
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Tungsten target and method for manufacturing same
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Year of Publication 01.03.2024
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A method of controlling the resistivity and stress of tungsten through PVD sputtering method
OKUBO, TAKU, NUMATA, YUKINOBU, OH, DO-HYUN, NAKANO, KATSUAKI, LEE, GA-YEONG, KANG, HANG
Year of Publication 01.01.2024
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Year of Publication 01.01.2024
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