Degradation of activation on Si-implanted GaAs crystal wafers by mechanical surface damages
WATANABE, M, SHINZAWA, S, OKUBO, S, OTOKI, Y, KUMA, S
Published in Japanese Journal of Applied Physics (01.11.1990)
Published in Japanese Journal of Applied Physics (01.11.1990)
Get full text
Journal Article
Electrical insulation properties of carbon-controlled semi-insulating GaAs
OTOKI, Y, WATANABE, M, TAKAHASHI, S, KUMA, S, OKUBO, S
Published in Japanese Journal of Applied Physics (01.08.1993)
Published in Japanese Journal of Applied Physics (01.08.1993)
Get full text
Journal Article