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GALE, Glenn W, RATH, David L, COOPER, Emanuel I, ESTES, Scott, OKORN-SCHMIDT, Harald F, BRIGANTE, Jeffrey, JAGANNATHAN, R, SETTEMBRE, Greg, ADAMS, Ed
Published in Journal of the Electrochemical Society (01.09.2001)
Published in Journal of the Electrochemical Society (01.09.2001)
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기판의 화학적 표면 처리 및/또는 전해 표면 처리를 위한 공정 유체용 차폐체 시스템
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Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements
Okorn-Schmidt, Harald F., Holsteyns, Frank, Lippert, Alexander, Mui, David, Kawaguchi, Mark, Lechner, Christiane, Frommhold, Philipp E., Nowak, Till, Reuter, Fabian, Piqué, Miquel Banchs, Cairós, Carlos, Mettin, Robert
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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(Invited) Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements
Okorn-Schmidt, Harald F., Holsteyns, Frank, Lippert, Alexander, Mui, David, Kawaguchi, Mark, Lechner, Christiane, Frommhold, Philipp E., Nowak, Till, Mettin, Robert
Published in ECS transactions (01.01.2013)
Published in ECS transactions (01.01.2013)
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WET-DRY INTEGRATED WAFER PROCESSING SYSTEM
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Year of Publication 27.09.2017
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AIR GAP SPACER INTEGRATION FOR IMPROVED FIN DEVICE PERFORMANCE
KIMURA YOSHIE, DELGADINO GERARDO A, BESSER PAUL RAYMOND, YANG DENGLIANG, VAN SCHRAVENDIJK BART, OKORN SCHMIDT HARALD
Year of Publication 27.04.2016
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Year of Publication 27.04.2016
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METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND OZONE
KUMNIG FRANZ, WIRNSBERGER THOMAS, OBWEGER RAINER, OKORN SCHMIDT HARALD
Year of Publication 05.12.2013
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Year of Publication 05.12.2013
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Process Parameter Control for BEOL TiN Hard Mask Etch-Back
Engesser, Philipp, Linder, Manuel, Hofer-Moser, Jörg, Okorn-Schmidt, Harald
Published in Solid state phenomena (01.08.2018)
Published in Solid state phenomena (01.08.2018)
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Surface Cleaning of SiGe(100) and Passivation of Ge(100) with Aqeuous Ammonium Sulfide
Heslop, Stacy Lynn, Engesser, Philipp, Okorn-Schmidt, Harald F., Muscat, Anthony J.
Published in ECS transactions (11.09.2015)
Published in ECS transactions (11.09.2015)
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