Adsorption behavior of organic contaminants on a silicon wafer surface
SUGIMOTO, Fumitoshi, OKAMURA, Sigeru
Published in Journal of the Electrochemical Society (01.07.1999)
Published in Journal of the Electrochemical Society (01.07.1999)
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Journal Article
Influence of Organic Contamination on Silicon Dioxide Integrity
Sugimoto, Fumitoshi, Okamura, Sigeru, Inokuma, Takao, Kurata, Yoshihiro, Hasegawa, Seiichi
Published in Japanese Journal of Applied Physics (01.05.2000)
Published in Japanese Journal of Applied Physics (01.05.2000)
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Photon stimulated desorption from finely polished metals irradiated with synchrotron radiation
MIYAUCHI, E, OKAMURA, S, TAGUCHI, T, GOTO, S, HISATSUGU, T
Published in Japanese Journal of Applied Physics (15.02.1991)
Published in Japanese Journal of Applied Physics (15.02.1991)
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