METHOD FOR DETECTING ELECTRICAL CONTACT BETWEEN PROBE AND MICROSCOPE SAMPLE AND ITS APPARATUS
SHIMIZU TETSUO, KATSUTA TEIJI, NIIHORI SHUNICHIRO, KASHIMURA KENTA, KIKUCHI ASUKA, NAITO YASUHISA, ANDO ATSUSHI, KATOGI KATSUYA, KAWAKAMI TATSUO, YOKOSUKA SHUNTARO, OHIRA TSUNEKIMI
Year of Publication 09.10.2008
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Year of Publication 09.10.2008
Patent