Apparatus for supplying chemical liquid and method of supplying chemical liquid
OH YOUNG KYU, JEONG CHANG HWA, GOO SE HUN, HONG CHUNG OH, LEE JUNG SOO
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
Patent
Apparatus for processing substrate and method thereof
OH YOUNG KYU, JEONG CHANG HWA, GOO SE HUN, PARK GI HONG, LEE JUNG SOO, HONG CHUNG OH
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
Patent
APPARATUS AND METHOD FOR TREATING SUBSTRATE
OH YOUNG KYU, JEONG CHANG HWA, GOO SE HUN, LEE JUNG SOO, HONG CHUNG OH
Year of Publication 02.06.2022
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Year of Publication 02.06.2022
Patent
FLOATING STAGE AND APPARATUS FOR PROCESSING SUBSTRATE HAVING THE SAME
OH YOUNG KYU, GOO SE HUN, PARK GI HONG, LEE JUNG SOO, HONG CHUNG OH, HA MIN JEONG
Year of Publication 08.10.2021
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Year of Publication 08.10.2021
Patent