Impact of Light-Element Impurities on Crystalline Defect Generation in Silicon Wafer
Tachibana, Tomihisa, Sameshima, Takashi, Kojima, Takuto, Arafune, Koji, Kakimoto, Koichi, Miyamura, Yoshiji, Harada, Hirofumi, Sekiguchi, Takashi, Ohshita, Yoshio, Ogura, Atsushi
Published in Japanese Journal of Applied Physics (01.02.2012)
Published in Japanese Journal of Applied Physics (01.02.2012)
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Journal Article
Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
Kurishima, Kazunori, Nabatame, Toshihide, Shimizu, Maki, Aikawa, Shinya, Tsukagoshi, Kazuhito, Ohi, Akihiko, Chikyo, Toyohiro, Ogura, Atsushi
Published in ECS transactions (20.03.2014)
Published in ECS transactions (20.03.2014)
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Journal Article
GeSn Film Deposition Using Metal Organic Chemical Vapor Deposition
Suda, Kohei, Uno, Tomohiro, Miyakawa, Tatsuya, Machida, Hideaki, Ishikawa, Masato, Sudo, Hiroshi, Ohshita, Yoshio, Ogura, Atsushi
Published in ECS transactions (03.05.2013)
Published in ECS transactions (03.05.2013)
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Journal Article
On the Origin of the Gate Oxide Failure Evaluated by Raman Spectroscopy
Yokogawa, Ryo, Tomita, Motohiro, Mizukoshi, Toshikazu, Hirano, Takehiro, Kusano, Kenichiro, Sasaki, Katsuhiro, Ogura, Atsushi
Published in ECS transactions (31.03.2015)
Published in ECS transactions (31.03.2015)
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Journal Article
Angle-resolved photoelectron spectroscopy study on interfacial transition layer and oxidation-induced residual stress in Si(100) substrate near the interface
Suwa, Tomoyuki, Teramoto, Akinobu, Nagata, Kohki, Ogura, Atsushi, Nohira, Hiroshi, Muro, Takayuki, Kinoshita, Toyohiko, Sugawa, Shigetoshi, Ohmi, Tadahiro, Hattori, Takeo
Published in Microelectronic engineering (01.09.2013)
Published in Microelectronic engineering (01.09.2013)
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Journal Article
Nanoscale Wet Etching of Physical-Vapor-Deposited Titanium Nitride and Its Application to Sub-30-nm-Gate-Length Fin-Type Double-Gate Metal--Oxide--Semiconductor Field-Effect Transistor Fabrication
Liu, Yongxun, Kamei, Takahiro, Endo, Kazuhiko, O'uchi, Shinichi, Tsukada, Junichi, Yamauchi, Hiromi, Hayashida, Tetsuro, Ishikawa, Yuki, Matsukawa, Takashi, Sakamoto, Kunihiro, Ogura, Atsushi, Masahara, Meishoku
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Mobility and Velocity Enhancement Effects of High Uniaxial Stress on Si (100) and (110) Substrates for Short-Channel pFETs
Mayuzumi, Satoru, Yamakawa, Shinya, Kosemura, Daisuke, Takei, Munehisa, Nagata, Kohki, Akamatsu, Hiroaki, Wakabayashi, Hitoshi, Amari, Koichi, Tateshita, Yasushi, Tsukamoto, Masanori, Ohno, Terukazu, Ogura, Atsushi, Nagashima, Naoki
Published in IEEE transactions on electron devices (01.06.2010)
Published in IEEE transactions on electron devices (01.06.2010)
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Journal Article
Study of the Degradation of p–n Diode Characteristics Caused by Small-Angle Grain Boundaries in Multi-Crystalline Silicon Substrate for Solar Cells
Tachibana, Tomihisa, Masuda, Junichi, Imai, Keita, Ogura, Atsushi, Ohshita, Yoshio, Arafune, Koji, Tajima, Michio
Published in Japanese Journal of Applied Physics (01.12.2009)
Published in Japanese Journal of Applied Physics (01.12.2009)
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Journal Article
Gate Structure Dependence of Variability in Polycrystalline Silicon Fin-Channel Flash Memories
Liu, Yongxun, Kamei, Takahiro, Matsukawa, Takashi, Endo, Kazuhiko, O'uchi, Shinichi, Tsukada, Junichi, Yamauchi, Hiromi, Ishikawa, Yuki, Hayashida, Tetsuro, Sakamoto, Kunihiro, Ogura, Atsushi, Masahara, Meishoku
Published in Japanese Journal of Applied Physics (01.06.2013)
Published in Japanese Journal of Applied Physics (01.06.2013)
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Journal Article
Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy
Yamamoto, Shotaro, Kosemura, Daisuke, C.M.Yusoff, S.Norhidayah, Kijima, Takahiro, Imai, Ryosuke, Takeuchi, Kazuma, Yokogawa, Ryo, Usuda, Koji, Ogura, Atsushi
Published in ECS transactions (12.08.2014)
Published in ECS transactions (12.08.2014)
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Journal Article
Complete genome sequence of the mitochondrial DNA of the sparkling enope squid, Watasenia scintillans
Hayashi, Keiko, Kawai, Yuri L., Yura, Kei, Yoshida, Masa-aki, Ogura, Atsushi, Hata, Kenichiro, Nakabayashi, Kazuhiko, Okamura, Kohji
Published in Mitochondrial DNA. Part A. DNA mapping, sequencing, and analysis (01.05.2016)
Published in Mitochondrial DNA. Part A. DNA mapping, sequencing, and analysis (01.05.2016)
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Journal Article
Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
Nagata, Kohki, Nagasaka, Masaya, Yamaguchi, Takuya, Ogura, Atsushi, Oji, Hiroshi, Son, Jin-Young, Hirosawa, Ichiro, Watanabe, Y., Hirota, Y.
Published in ECS transactions (03.05.2013)
Published in ECS transactions (03.05.2013)
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Journal Article
Characterization of Strain for High-Performance Metal–Oxide–Semiconductor Field-Effect-Transistor
Kosemura, Daisuke, Kakemura, Yasuto, Yoshida, Tetsuya, Ogura, Atsushi, Kohno, Masayuki, Nishita, Tatsuo, Nakanishi, Toshio
Published in Japanese Journal of Applied Physics (01.04.2008)
Published in Japanese Journal of Applied Physics (01.04.2008)
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Journal Article
(Invited) Mobility Enhancement of Uniaxially Strained Germanium Nanowire MOSFETs
Ikeda, Keiji, Kamimuta, Yuuichi, Moriyama, Yoshihiko, Ono, Mizuki, Usuda, Koji, Oda, Minoru, Irisawa, Toshifumi, Kosemura, Daisuke, Ogura, Atsushi, Tezuka, Tsutomu
Published in ECS transactions (12.08.2014)
Published in ECS transactions (12.08.2014)
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Journal Article
Fabrication and performance analysis of a mechanical stack InGaP/GaAs//Si solar cell
Kan-Hua Lee, Nakamura, Kyotaro, Kamioka, Takefumi, Kojima, Nobuaki, Hyunju Lee, Li Wang, Araki, Kenji, Ohshita, Yoshio, Ogura, Atsushi, Yamaguchi, Masafumi
Published in 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) (01.06.2016)
Published in 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) (01.06.2016)
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Conference Proceeding